Hybrid silicon microaccelerometer system with CMOS interface circuit

Salian A., KÜLAH H., Yazdi N., Guohong H., Najafi K.

Proceedings of the 43rd IEEE Midwest Symposium on Circuits and Systems (Cat.No.CH37144), Lansing, MI, USA, United States Of America, 8 - 11 August 2000, (Full Text)

  • Publication Type: Conference Paper / Full Text
  • Doi Number: 10.1109/mwscas.2000.951626
  • City: Lansing, MI, USA
  • Country: United States Of America
  • Middle East Technical University Affiliated: No