Hybrid silicon microaccelerometer system with CMOS interface circuit

Salian A., KÜLAH H. , Yazdi N., Guohong H., Najafi K.

Proceedings of the 43rd IEEE Midwest Symposium on Circuits and Systems (Cat.No.CH37144), Lansing, MI, USA, United States Of America, 8 - 11 August 2000

  • Publication Type: Conference Paper / Full Text
  • Doi Number: 10.1109/mwscas.2000.951626
  • City: Lansing, MI, USA
  • Country: United States Of America