High-performance SOI-MEMS gyroscope with decoupled oscillation modes

Alper S., Azgin K., Akin T.

19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006), İstanbul, Turkey, 22 - 26 January 2006, pp.70-73 identifier identifier

  • Publication Type: Conference Paper / Full Text
  • City: İstanbul
  • Country: Turkey
  • Page Numbers: pp.70-73
  • Middle East Technical University Affiliated: Yes


This paper presents a new, high-performance SOI-MEMS gyroscope with decoupled oscillation modes. The gyroscope structure allows to achieve matched-resonance-frequencies, large drive-mode oscillation amplitude, high sense-mode quality factor, and low mechanical crosstalk, demonstrating a measured noise-equivalent rate of 90 (deg/hr)/Hz(1/2) even at atmospheric pressure. The angular rate sensitivity of the gyroscope is 100 mu V/(deg/sec) at atmospheric pressure. This value improves to 2.4mV/(deg/sec) at vacuum, for which the measured noise-equivalent rate of the gyroscope reaches to 35 (deg/hr)/Hz(1/2). The R-2-nonlinearity of the gyroscope is measured to be better than 0.02%. The gyroscope has a low quadrature signal of 70deg/sec and a short-term bias stability of 1.5deg/sec.