Ba1-xSrxTiO3 films prepared by chemical solution deposition

ÖZENBAŞ A. M., ÖZGÜVEN H. N., Emre M., Demirbaş M.

Proceedings of the 8th Conference and Exhibition of the European Ceramic Society, İstanbul, Turkey, 29 June - 03 July 2003, pp.1249-1252 identifier

  • Publication Type: Conference Paper / Full Text
  • Volume:
  • City: İstanbul
  • Country: Turkey
  • Page Numbers: pp.1249-1252
  • Middle East Technical University Affiliated: Yes


The present work describes the preparation and the physical properties of Ba1-xSrxTiO3 (x is between 0.2 and 0.4) films by chemical solution deposition. High-quality films with uniform composition and thickness were successfully produced by spin-coating. The layers have been deposited on top of Pt/Ti/SiO2/Si substrates using barium and strontium acetates, dissolved in acetic acid, mixed up with titanium tetra-isopropoxide in isopropanol. The amounts of each constituent have been carefully adjusted to obtain stable and homogeneous sols. Different thermal treatments of the deposited layers have been carried out. They consist of a pre-firing cycle (330°C or 550°C) followed by annealing at 800°C for 3 hours. The heat treatment conditions for the decomposition of residual organics in the films were determined on the basis of thermal analyses of the bulk gels. XRD analyses showed that films of 1-2.5 (μm thickness were polycrystalline with no preferred crystallographic orientation. The metal-BST-metal structure of the films displayed good dielectric properties. The capacitance-frequency curve reveals that the dielectric constant can reach a value of 900 at 1 kHz.