A Symmetrical and Decoupled Microgyroscope with Electroforming Process on Insulating Substrate

Akın T., Alper S. E.

European conference on solid-state transducers; Eurosensors XVI , Praha, Czech Republic, 15 - 18 September 2002, pp.471-472

  • Publication Type: Conference Paper / Full Text
  • City: Praha
  • Country: Czech Republic
  • Page Numbers: pp.471-472
  • Middle East Technical University Affiliated: Yes