Fluorene-type Thin Films Synthesized under Biphenyl and Ethylene RF Plasma

Mansuroglu D., Manolache S.

12th IEEE International Conference on Nanotechnology (IEEE-NANO), Birmingham, United Kingdom, 20 - 23 August 2012 identifier

  • Publication Type: Conference Paper / Full Text
  • City: Birmingham
  • Country: United Kingdom
  • Middle East Technical University Affiliated: Yes


The mixture of biphenyl (C12H10) and ethylene (C2H4) plasma was used to synthesize fluorene (C13H10) -type films by a 13.56 MHz capacitive coupled RF plasma system. The thin films were deposited on glass slides. Changes of layers were investigated when a negative bias potential was applied to the holder of the substrate. The chemical environment was explored by residual gas analysis (RGA) mass spectrometry. Deposited layers were investigated by UV-visible spectroscopy, Atomic Force Microscope (AFM) and ellipsometry. The thin films were doped with Iodine (I-2) for different time periods.