Effect of Annealing on the Structural, Chemical and Electrical Characteristics of the HfO2 Thin Films

KAYA Ş., LÖK R., AKTAĞ A., KARAÇALI H., YILDIZ İ. , YILMAZ E.

Cost To-Be Spring Meating 2017, Luxembourg, 3 - 05 April 2017

  • Publication Type: Conference Paper / Summary Text
  • Country: Luxembourg