An integrated thermopile structure with high responsivity using any standard CMOS process

Akın T., Olgun Z., Akar O., Külah H.

Sensors and Actuators, A: Physical, vol.66, pp.218-224, 1998 (SCI-Expanded) identifier identifier

  • Publication Type: Article / Article
  • Volume: 66
  • Publication Date: 1998
  • Doi Number: 10.1016/s0924-4247(98)00038-7
  • Journal Name: Sensors and Actuators, A: Physical
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Page Numbers: pp.218-224
  • Keywords: thermopiles, infrared sensors, CMOS integration, ELECTROCHEMICAL ETCH-STOP, SILICON
  • Middle East Technical University Affiliated: Yes