Copy For Citation
Akın T., Olgun Z., Akar O., Külah H.
Sensors and Actuators, A: Physical, vol.66, pp.218-224, 1998 (SCI-Expanded)
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Publication Type:
Article / Article
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Volume:
66
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Publication Date:
1998
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Doi Number:
10.1016/s0924-4247(98)00038-7
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Journal Name:
Sensors and Actuators, A: Physical
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Journal Indexes:
Science Citation Index Expanded (SCI-EXPANDED), Scopus
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Page Numbers:
pp.218-224
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Keywords:
thermopiles, infrared sensors, CMOS integration, ELECTROCHEMICAL ETCH-STOP, SILICON
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Middle East Technical University Affiliated:
Yes