An electrostatically actuated parylene microvalve for lab on a chip applications

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YILDIRIM E., ARIKAN M. A. S., KÜLAH H.

16. International Conference on Solid State Sensors, Actuators and Micro Systems, 5 - 09 July 2011

• Publication Type: Conference Paper / Full Text
• Doi Number: 10.1109/transducers.2011.5969441
• Middle East Technical University Affiliated: Yes