A MEMS Based Lens Microscanner for Resolution Enhancement of Infrared Imaging Systems

Sozak A., Simsek E., AZGIN K.

18th IEEE Sensors Conference, Montreal, Kanada, 27 - 30 Ekim 2019 identifier identifier


The aim of this study is to demonstrate a Micro Electro Mechanical Systems (MEMS) based in-plane (x and y axes) lens scanner to improve the resolution of Long Wave Infrared Optical Systems (8-12 mu m wavelength). The proposed actuator consists of a 2 axis decoupled stage and has 4 separate V-Shaped (Chevron) thermal actuators which provide sufficient force and displacement to position the lens within required time. Miniaturization of lens has been achieved by using an aspherical surface and optimization of optical system parameters. Actuators have 40 micrometers displacement capability which is sufficient for sub-pixel image motion on the detector. Frequency of actuation is 25 Hz which corresponds to construction of 1 frame per 40 milliseconds.