The inductors are essential elements for RF design. For RFIC design, bondwires, planar solenoidal and planar spiral inductors are available. Due to some limitations of bondwires and planar solenoidal inductors, planar spiral inductors are the most popular ones. The designers try to get accurate lumped element models for modeling planar spiral inductors to be able to simulate the circuit performance correctly before getting the integrated circuit manufactured. In this study, planar spiral inductors measurement methods have been discussed, and the comparison between lumped element model simulation results and experimental measurement results have been given. The results of this study show that it is possible to model planar spiral inductors with lumped element circuit models parameters of which can be calculated by basic but accurate expressions. ©2004 IEEE.