Monolithically Integrated MEMS Phased Array

Topallı K., Aydın Çivi H. Ö., Demir Ş., Koç S. S., Akın T.

Proceedings of 8th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE, Barcelona, Spain, 26 - 29 June 2007, pp.119-122

  • Publication Type: Conference Paper / Full Text
  • City: Barcelona
  • Country: Spain
  • Page Numbers: pp.119-122
  • Middle East Technical University Affiliated: Yes