An Integrated Thermopile Structure with High Responsivity and Detectivity in Any Standard CMOS Technology | AVESİS

Middle East Technical University Research Information System

An Integrated Thermopile Structure with High Responsivity and Detectivity in Any Standard CMOS Technology

Copy For Citation

Olgun Z., Akar O., KÜLAH H., AKIN T.

Int. Conf. on Solid-State Sensors and Actuators (TRANSDUCERS'97), 19 June 1997

Publication Type: Conference Paper / Full Text
Middle East Technical University Affiliated: Yes