Metal to metal and capacitive contact RF MEMS shunt switch structures

ATASOY H. İ., TOPALLI K., ÜNLÜ M., İSTANBULLUOĞLU İ., TEMOÇİN E. U., BAYRAKTAR Ö., ...More

7th Workshop on MEMS for MilimeterWave Communications (MEMSWAVE), 27 - 30 June 2006, pp.154-156

  • Publication Type: Conference Paper / Full Text
  • Page Numbers: pp.154-156
  • Middle East Technical University Affiliated: Yes