Spin-on Dopant Based Fabrication Methodology of Integrated Photonic Devices

ŞAHİN A., AKDENİZ O., KOCAMAN S.

CLEO: Science and Innovations in CLEO 2024, CLEO: S and I 2024 - Part of Conference on Lasers and Electro-Optics, North Carolina, United States Of America, 5 - 10 May 2024 identifier

  • Publication Type: Conference Paper / Full Text
  • City: North Carolina
  • Country: United States Of America
  • Middle East Technical University Affiliated: Yes

Abstract

Sparse schedules associated with ion implantation impede the development of active optical devices. This study presents a process based on spin-on dopants that allows in-house fabrication of active devices.