1-6 GHz UWB phase shifter design and implementation with surface micromachining

Tokgöz K. K., Çetintepe Ç., DEMİR Ş.

6th European Conference on Antennas and Propagation, EuCAP 2012, Prague, Czech Republic, 26 - 30 March 2012, pp.2933-2937 identifier

  • Publication Type: Conference Paper / Full Text
  • Doi Number: 10.1109/eucap.2012.6206455
  • City: Prague
  • Country: Czech Republic
  • Page Numbers: pp.2933-2937
  • Keywords: All-Pass, Metal-Insulator-Metal Capacitor, Phase Shifter, Planar Spiral Inductor, Surface micromachining, UWB
  • Middle East Technical University Affiliated: Yes


An Ultra-wideband (UWB), 1-to-6 GHz, 4-bit phase shifter design is presented. The proposed phase shifter utilizes lumped-element, three-stage all-pass network to achieve UWB phase characteristics. Ideal predesign of the phase shifter is done successfully by following the three-stage all-pass network design procedure described in this paper. Following the ideal predesign, circuit elements are implemented using lumped planar spiral inductors (PSIs) and Metal-Insulator-Metal (MIM) capacitors for each phase shift bit and a practical design incorporating element parasitics is accomplished. The simulation results for each phase shift bit as well as all bit-states are provided for the practical design and the ideal one along with phase-related error information. According to the simulation results, the practical design exhibits a maximum rms phase error of 5.3% over 1-6 GHz frequency band. Prototype planar spiral inductors are fabricated using an in-house surface micromachining technology and a good agreement is attained between the simulation and measurement results, which validates the design procedure. © 2012 IEEE.