A fourth order unconstrained ∑Δ capacitive accelerometer

Sonmez U., KÜLAH H., AKIN T.

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, Beijing, China, 5 - 09 June 2011, pp.707-710 identifier

  • Publication Type: Conference Paper / Full Text
  • Doi Number: 10.1109/transducers.2011.5969214
  • City: Beijing
  • Country: China
  • Page Numbers: pp.707-710
  • Middle East Technical University Affiliated: Yes