DESIGN AND DEVELOPMENT OF FIBER OPTIC MEMS MICROPHONEMEASUREMENT SYSTEM


Thesis Type: Postgraduate

Institution Of The Thesis: Middle East Technical University, Graduate School of Natural and Applied Sciences, Graduate School of Natural and Applied Sciences, Turkey

Approval Date: 2019

Thesis Language: English

Student: EKİN MUHARREM KARACA

Supervisor: Barış Bayram

Abstract:

In this thesis, fiber optic MEMS microphone measurement system is designed and demonstrated. The displacement of the sensing element of the fiber optic microphone, the membrane, together with the optical components are 3-D modeled and simulated by means of finite element methods. The parameters of the optical system under different measurement conditions are optimized according to the simulation results. Based on the simulation results, the measurement system setup is designed, constructed and functionalized. The optical components of the system are chosen such that the overall system is compatible to high quality detection of the displacement of the membrane. The simulation results and experimental data are demonstrated to validate the operation of the measurement system. The system is demonstrated with optical components and the membrane, and characteristics of the fiber optic microphone are obtained. The results and observations related to the overall system are presented.