Reliability improvement of RF MEMS devices based on lifetime measurements


Thesis Type: Postgraduate

Institution Of The Thesis: Orta Doğu Teknik Üniversitesi, Faculty of Engineering, Department of Electrical and Electronics Engineering, Turkey

Approval Date: 2010

Student: OZAN DOĞAN GÜRBÜZ

Co-Supervisor: TAYFUN AKIN, ŞİMŞEK DEMİR

Abstract:

This thesis presents fabrication of shunt, capacitive contact type RF MEMS switches which are designed according to given mm-wave performance specifications. The designed switches are modified for investigation in terms of reliability and lifetime. To observe the real-time performance of switches a time domain measurement setup is established and a CV (capacitance vs. voltage) curve measurement system is also included to measure CV curves, pull-in and hold-down voltages and the shifts of these due to actuations. By using the established setup reliability and lifetime measurements under different bias waveforms in different environments are performed. After investigation for the most suitable condition for improving lifetime long-term tests are performed and the outstanding result of more than 885 hours of operation under cycling bias waveform is obtained.