AYDEMİR, A. And AKIN, T. 2015. DRIE Process Optimization to Achieve High Aspect Ratio for Capacitive MEMS Sensors. The 26th Micromechanics and Micro Systems Europe Workshop, (MME’15) .

AYDEMİR, A., & AKIN, T., (2015). DRIE Process Optimization to Achieve High Aspect Ratio for Capacitive MEMS Sensors . The 26th Micromechanics and Micro Systems Europe Workshop, (MME’15)

AYDEMİR, AKIN, And TAYFUN AKIN. "DRIE Process Optimization to Achieve High Aspect Ratio for Capacitive MEMS Sensors," The 26th Micromechanics and Micro Systems Europe Workshop, (MME’15), 2015

AYDEMİR, AKIN And AKIN, TAYFUN. "DRIE Process Optimization to Achieve High Aspect Ratio for Capacitive MEMS Sensors." The 26th Micromechanics and Micro Systems Europe Workshop, (MME’15) , 2015

AYDEMİR, A. And AKIN, T. (2015) . "DRIE Process Optimization to Achieve High Aspect Ratio for Capacitive MEMS Sensors." The 26th Micromechanics and Micro Systems Europe Workshop, (MME’15) .

@conferencepaper{conferencepaper, author={AKIN AYDEMİR And author={TAYFUN AKIN}, title={DRIE Process Optimization to Achieve High Aspect Ratio for Capacitive MEMS Sensors}, congress name={The 26th Micromechanics and Micro Systems Europe Workshop, (MME’15)}, city={}, country={}, year={2015}}