T. A. Anutgan Et Al. , "Effect of heat treatment on the stress and structure evolution of plasma deposited boron nitride thin films," SURFACE & COATINGS TECHNOLOGY , vol.202, no.13, pp.3058-3066, 2008
Anutgan, T. A. Et Al. 2008. Effect of heat treatment on the stress and structure evolution of plasma deposited boron nitride thin films. SURFACE & COATINGS TECHNOLOGY , vol.202, no.13 , 3058-3066.
Anutgan, T. A., Anutgan, M., Wdemir, O., Atilgan, I., & Katircioglu, B., (2008). Effect of heat treatment on the stress and structure evolution of plasma deposited boron nitride thin films. SURFACE & COATINGS TECHNOLOGY , vol.202, no.13, 3058-3066.
Anutgan, T. Et Al. "Effect of heat treatment on the stress and structure evolution of plasma deposited boron nitride thin films," SURFACE & COATINGS TECHNOLOGY , vol.202, no.13, 3058-3066, 2008
Anutgan, T. A. Et Al. "Effect of heat treatment on the stress and structure evolution of plasma deposited boron nitride thin films." SURFACE & COATINGS TECHNOLOGY , vol.202, no.13, pp.3058-3066, 2008
Anutgan, T. A. Et Al. (2008) . "Effect of heat treatment on the stress and structure evolution of plasma deposited boron nitride thin films." SURFACE & COATINGS TECHNOLOGY , vol.202, no.13, pp.3058-3066.
@article{article, author={T. Aliyeva Anutgan Et Al. }, title={Effect of heat treatment on the stress and structure evolution of plasma deposited boron nitride thin films}, journal={SURFACE & COATINGS TECHNOLOGY}, year=2008, pages={3058-3066} }