Beker, L. Et Al. 2014. A parylene coating based room temperature wafer-level attachment method for MEMS integration with zero applied force. SENSORS AND ACTUATORS A-PHYSICAL , vol.215 , 1-7.

Beker, L., Zorlu, O., & KÜLAH, H., (2014). A parylene coating based room temperature wafer-level attachment method for MEMS integration with zero applied force. SENSORS AND ACTUATORS A-PHYSICAL , vol.215, 1-7.

Beker, Levent, Ozge Zorlu, And HALUK KÜLAH. "A parylene coating based room temperature wafer-level attachment method for MEMS integration with zero applied force," SENSORS AND ACTUATORS A-PHYSICAL , vol.215, 1-7, 2014

Beker, Levent Et Al. "A parylene coating based room temperature wafer-level attachment method for MEMS integration with zero applied force." SENSORS AND ACTUATORS A-PHYSICAL , vol.215, pp.1-7, 2014

Beker, L. Zorlu, O. And KÜLAH, H. (2014) . "A parylene coating based room temperature wafer-level attachment method for MEMS integration with zero applied force." SENSORS AND ACTUATORS A-PHYSICAL , vol.215, pp.1-7.

@article{article, author={Levent Beker Et Al. }, title={A parylene coating based room temperature wafer-level attachment method for MEMS integration with zero applied force}, journal={SENSORS AND ACTUATORS A-PHYSICAL}, year=2014, pages={1-7} }