Aydemir, A. And Akin, T. 2012. Prevention of sidewall redeposition of etched byproducts in the dry Au etch process. JOURNAL OF MICROMECHANICS AND MICROENGINEERING , vol.22, no.7 .

Aydemir, A., & Akin, T., (2012). Prevention of sidewall redeposition of etched byproducts in the dry Au etch process. JOURNAL OF MICROMECHANICS AND MICROENGINEERING , vol.22, no.7.

Aydemir, A., And TAYFUN AKIN. "Prevention of sidewall redeposition of etched byproducts in the dry Au etch process," JOURNAL OF MICROMECHANICS AND MICROENGINEERING , vol.22, no.7, 2012

Aydemir, A. And Akin, TAYFUN. "Prevention of sidewall redeposition of etched byproducts in the dry Au etch process." JOURNAL OF MICROMECHANICS AND MICROENGINEERING , vol.22, no.7, 2012

Aydemir, A. And Akin, T. (2012) . "Prevention of sidewall redeposition of etched byproducts in the dry Au etch process." JOURNAL OF MICROMECHANICS AND MICROENGINEERING , vol.22, no.7.

@article{article, author={A. Aydemir And author={TAYFUN AKIN}, title={Prevention of sidewall redeposition of etched byproducts in the dry Au etch process}, journal={JOURNAL OF MICROMECHANICS AND MICROENGINEERING}, year=2012}