Alper, S. E. And Akin, T. 2005. A single-crystal silicon symmetrical and decoupled MEMS gyroscope on an insulating substrate. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , vol.14 , 707-717.

Alper, S. E., & Akin, T., (2005). A single-crystal silicon symmetrical and decoupled MEMS gyroscope on an insulating substrate. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , vol.14, 707-717.

Alper, Said, And TAYFUN AKIN. "A single-crystal silicon symmetrical and decoupled MEMS gyroscope on an insulating substrate," JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , vol.14, 707-717, 2005

Alper, Said E. And Akin, TAYFUN. "A single-crystal silicon symmetrical and decoupled MEMS gyroscope on an insulating substrate." JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , vol.14, pp.707-717, 2005

Alper, S. E. And Akin, T. (2005) . "A single-crystal silicon symmetrical and decoupled MEMS gyroscope on an insulating substrate." JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , vol.14, pp.707-717.

@article{article, author={Said Emre Alper And author={TAYFUN AKIN}, title={A single-crystal silicon symmetrical and decoupled MEMS gyroscope on an insulating substrate}, journal={JOURNAL OF MICROELECTROMECHANICAL SYSTEMS}, year=2005, pages={707-717} }