Alper, S. E. Et Al. 2009. Stepped-etching for preserving critical dimensions in through-wafer deep reactive ion etching of thick silicon. TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems , (Denver, CO, United States Of America), 1110-1113.

Alper, S. E., Aydemir, A., & AKIN, T., (2009). Stepped-etching for preserving critical dimensions in through-wafer deep reactive ion etching of thick silicon . TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems (pp.1110-1113). Denver, CO, United States Of America

Alper, Said, A. Aydemir, And TAYFUN AKIN. "Stepped-etching for preserving critical dimensions in through-wafer deep reactive ion etching of thick silicon," TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver, CO, United States Of America, 2009

Alper, Said E. Et Al. "Stepped-etching for preserving critical dimensions in through-wafer deep reactive ion etching of thick silicon." TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems , Denver, CO, United States Of America, pp.1110-1113, 2009

Alper, S. E. Aydemir, A. And AKIN, T. (2009) . "Stepped-etching for preserving critical dimensions in through-wafer deep reactive ion etching of thick silicon." TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems , Denver, CO, United States Of America, pp.1110-1113.

@conferencepaper{conferencepaper, author={Said Emre Alper Et Al. }, title={Stepped-etching for preserving critical dimensions in through-wafer deep reactive ion etching of thick silicon}, congress name={TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems}, city={Denver, CO}, country={United States Of America}, year={2009}, pages={1110-1113} }