Aydın, G. D. And Akın, T. 2020. Resonance-Based Temperature Sensors using a Wafer Level Vacuum Packaged SOI MEMS Process. Advanced Materials Letters , vol.11, no.1 .

Aydın, G. D., & Akın, T., (2020). Resonance-Based Temperature Sensors using a Wafer Level Vacuum Packaged SOI MEMS Process. Advanced Materials Letters , vol.11, no.1.

Aydın, Gülşah, And TAYFUN AKIN. "Resonance-Based Temperature Sensors using a Wafer Level Vacuum Packaged SOI MEMS Process," Advanced Materials Letters , vol.11, no.1, 2020

Aydın, Gülşah D. And Akın, TAYFUN. "Resonance-Based Temperature Sensors using a Wafer Level Vacuum Packaged SOI MEMS Process." Advanced Materials Letters , vol.11, no.1, 2020

Aydın, G. D. And Akın, T. (2020) . "Resonance-Based Temperature Sensors using a Wafer Level Vacuum Packaged SOI MEMS Process." Advanced Materials Letters , vol.11, no.1.

@article{article, author={Gülşah Demirhan Aydın And author={TAYFUN AKIN}, title={Resonance-Based Temperature Sensors using a Wafer Level Vacuum Packaged SOI MEMS Process}, journal={Advanced Materials Letters}, year=2020}