E. Yildirim And H. KÜLAH, "Analysis and characterization of an electrostatically actuated in-plane parylene microvalve," JOURNAL OF MICROMECHANICS AND MICROENGINEERING , vol.21, no.10, 2011
Yildirim, E. And KÜLAH, H. 2011. Analysis and characterization of an electrostatically actuated in-plane parylene microvalve. JOURNAL OF MICROMECHANICS AND MICROENGINEERING , vol.21, no.10 .
Yildirim, E., & KÜLAH, H., (2011). Analysis and characterization of an electrostatically actuated in-plane parylene microvalve. JOURNAL OF MICROMECHANICS AND MICROENGINEERING , vol.21, no.10.
Yildirim, ENDER, And HALUK KÜLAH. "Analysis and characterization of an electrostatically actuated in-plane parylene microvalve," JOURNAL OF MICROMECHANICS AND MICROENGINEERING , vol.21, no.10, 2011
Yildirim, ENDER And KÜLAH, HALUK. "Analysis and characterization of an electrostatically actuated in-plane parylene microvalve." JOURNAL OF MICROMECHANICS AND MICROENGINEERING , vol.21, no.10, 2011
Yildirim, E. And KÜLAH, H. (2011) . "Analysis and characterization of an electrostatically actuated in-plane parylene microvalve." JOURNAL OF MICROMECHANICS AND MICROENGINEERING , vol.21, no.10.
@article{article, author={ENDER YILDIRIM And author={HALUK KÜLAH}, title={Analysis and characterization of an electrostatically actuated in-plane parylene microvalve}, journal={JOURNAL OF MICROMECHANICS AND MICROENGINEERING}, year=2011}