E. S. Topalli Et Al. , "Pirani Vacuum Gauges Using Silicon-on-Glass and Dissolved-Wafer Processes for the Characterization of MEMS Vacuum Packaging," IEEE SENSORS JOURNAL , vol.9, pp.263-270, 2009
Topalli, E. S. Et Al. 2009. Pirani Vacuum Gauges Using Silicon-on-Glass and Dissolved-Wafer Processes for the Characterization of MEMS Vacuum Packaging. IEEE SENSORS JOURNAL , vol.9 , 263-270.
Topalli, E. S., Topalli, K., Alper, S. E., Serin, T., & Akin, T., (2009). Pirani Vacuum Gauges Using Silicon-on-Glass and Dissolved-Wafer Processes for the Characterization of MEMS Vacuum Packaging. IEEE SENSORS JOURNAL , vol.9, 263-270.
Topalli, Ebru Et Al. "Pirani Vacuum Gauges Using Silicon-on-Glass and Dissolved-Wafer Processes for the Characterization of MEMS Vacuum Packaging," IEEE SENSORS JOURNAL , vol.9, 263-270, 2009
Topalli, Ebru S. Et Al. "Pirani Vacuum Gauges Using Silicon-on-Glass and Dissolved-Wafer Processes for the Characterization of MEMS Vacuum Packaging." IEEE SENSORS JOURNAL , vol.9, pp.263-270, 2009
Topalli, E. S. Et Al. (2009) . "Pirani Vacuum Gauges Using Silicon-on-Glass and Dissolved-Wafer Processes for the Characterization of MEMS Vacuum Packaging." IEEE SENSORS JOURNAL , vol.9, pp.263-270.
@article{article, author={Ebru Sagiroglu Topalli Et Al. }, title={Pirani Vacuum Gauges Using Silicon-on-Glass and Dissolved-Wafer Processes for the Characterization of MEMS Vacuum Packaging}, journal={IEEE SENSORS JOURNAL}, year=2009, pages={263-270} }