Atik, A. C. Et Al. 2020. Modeling and fabrication of electrostatically actuated diaphragms for on-chip valving of MEMS-compatible microfluidic systems. JOURNAL OF MICROMECHANICS AND MICROENGINEERING , vol.30, no.11 .

Atik, A. C., Ozkan, M. D., Ozgur, E., Külah, H., & Yıldırım, E., (2020). Modeling and fabrication of electrostatically actuated diaphragms for on-chip valving of MEMS-compatible microfluidic systems. JOURNAL OF MICROMECHANICS AND MICROENGINEERING , vol.30, no.11.

Atik, Ali Et Al. "Modeling and fabrication of electrostatically actuated diaphragms for on-chip valving of MEMS-compatible microfluidic systems," JOURNAL OF MICROMECHANICS AND MICROENGINEERING , vol.30, no.11, 2020

Atik, Ali C. Et Al. "Modeling and fabrication of electrostatically actuated diaphragms for on-chip valving of MEMS-compatible microfluidic systems." JOURNAL OF MICROMECHANICS AND MICROENGINEERING , vol.30, no.11, 2020

Atik, A. C. Et Al. (2020) . "Modeling and fabrication of electrostatically actuated diaphragms for on-chip valving of MEMS-compatible microfluidic systems." JOURNAL OF MICROMECHANICS AND MICROENGINEERING , vol.30, no.11.

@article{article, author={Ali Can Atik Et Al. }, title={Modeling and fabrication of electrostatically actuated diaphragms for on-chip valving of MEMS-compatible microfluidic systems}, journal={JOURNAL OF MICROMECHANICS AND MICROENGINEERING}, year=2020}