S. KINCAL And G. B. BAŞIM DOĞAN, "Impact of Pad Conditioning on Thickness Profile Control in Chemical Mechanical Planarization," JOURNAL OF ELECTRONIC MATERIALS , vol.42, no.1, pp.83-96, 2013
KINCAL, S. And BAŞIM DOĞAN, G. B. 2013. Impact of Pad Conditioning on Thickness Profile Control in Chemical Mechanical Planarization. JOURNAL OF ELECTRONIC MATERIALS , vol.42, no.1 , 83-96.
KINCAL, S., & BAŞIM DOĞAN, G. B., (2013). Impact of Pad Conditioning on Thickness Profile Control in Chemical Mechanical Planarization. JOURNAL OF ELECTRONIC MATERIALS , vol.42, no.1, 83-96.
KINCAL, SERKAN, And GÜL BAHAR BAŞIM DOĞAN. "Impact of Pad Conditioning on Thickness Profile Control in Chemical Mechanical Planarization," JOURNAL OF ELECTRONIC MATERIALS , vol.42, no.1, 83-96, 2013
KINCAL, SERKAN And BAŞIM DOĞAN, GÜL B. . "Impact of Pad Conditioning on Thickness Profile Control in Chemical Mechanical Planarization." JOURNAL OF ELECTRONIC MATERIALS , vol.42, no.1, pp.83-96, 2013
KINCAL, S. And BAŞIM DOĞAN, G. B. (2013) . "Impact of Pad Conditioning on Thickness Profile Control in Chemical Mechanical Planarization." JOURNAL OF ELECTRONIC MATERIALS , vol.42, no.1, pp.83-96.
@article{article, author={SERKAN KINCAL And author={GÜL BAHAR BAŞIM DOĞAN}, title={Impact of Pad Conditioning on Thickness Profile Control in Chemical Mechanical Planarization}, journal={JOURNAL OF ELECTRONIC MATERIALS}, year=2013, pages={83-96} }