Aydemir, A. And AKIN, T. 2015. Fabrication of a Three-Axis Capacitive MEMS Accelerometer on a Single Substrate. 2015 IEEE SENSORS , (Busan, South Korea), 528-531.

Aydemir, A., & AKIN, T., (2015). Fabrication of a Three-Axis Capacitive MEMS Accelerometer on a Single Substrate . 2015 IEEE SENSORS (pp.528-531). Busan, South Korea

Aydemir, Akin, And TAYFUN AKIN. "Fabrication of a Three-Axis Capacitive MEMS Accelerometer on a Single Substrate," 2015 IEEE SENSORS, Busan, South Korea, 2015

Aydemir, Akin And AKIN, TAYFUN. "Fabrication of a Three-Axis Capacitive MEMS Accelerometer on a Single Substrate." 2015 IEEE SENSORS , Busan, South Korea, pp.528-531, 2015

Aydemir, A. And AKIN, T. (2015) . "Fabrication of a Three-Axis Capacitive MEMS Accelerometer on a Single Substrate." 2015 IEEE SENSORS , Busan, South Korea, pp.528-531.

@conferencepaper{conferencepaper, author={Akin Aydemir And author={TAYFUN AKIN}, title={Fabrication of a Three-Axis Capacitive MEMS Accelerometer on a Single Substrate}, congress name={2015 IEEE SENSORS}, city={Busan}, country={South Korea}, year={2015}, pages={528-531} }