TEZ, S. Et Al. 2015. A Bulk-Micromachined Three-Axis Capacitive MEMS Accelerometer on a Single Die. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , vol.24, no.5 , 1264-1274.

TEZ, S., Aykutlu, U., Torunbalci, M. M., & AKIN, T., (2015). A Bulk-Micromachined Three-Axis Capacitive MEMS Accelerometer on a Single Die. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , vol.24, no.5, 1264-1274.

TEZ, SERDAR Et Al. "A Bulk-Micromachined Three-Axis Capacitive MEMS Accelerometer on a Single Die," JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , vol.24, no.5, 1264-1274, 2015

TEZ, SERDAR Et Al. "A Bulk-Micromachined Three-Axis Capacitive MEMS Accelerometer on a Single Die." JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , vol.24, no.5, pp.1264-1274, 2015

TEZ, S. Et Al. (2015) . "A Bulk-Micromachined Three-Axis Capacitive MEMS Accelerometer on a Single Die." JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , vol.24, no.5, pp.1264-1274.

@article{article, author={SERDAR TEZ Et Al. }, title={A Bulk-Micromachined Three-Axis Capacitive MEMS Accelerometer on a Single Die}, journal={JOURNAL OF MICROELECTROMECHANICAL SYSTEMS}, year=2015, pages={1264-1274} }