Torunbalci, M. M. Et Al. 2015. Advanced MEMS Process for Wafer Level Hermetic Encapsulation of MEMS Devices Using SOI Cap Wafers With Vertical Feedthroughs. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , vol.24 , 556-564.

Torunbalci, M. M., Alper, S. E., & Akın, T., (2015). Advanced MEMS Process for Wafer Level Hermetic Encapsulation of MEMS Devices Using SOI Cap Wafers With Vertical Feedthroughs. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , vol.24, 556-564.

Torunbalci, Mustafa, Said Emre Alper, And TAYFUN AKIN. "Advanced MEMS Process for Wafer Level Hermetic Encapsulation of MEMS Devices Using SOI Cap Wafers With Vertical Feedthroughs," JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , vol.24, 556-564, 2015

Torunbalci, Mustafa M. Et Al. "Advanced MEMS Process for Wafer Level Hermetic Encapsulation of MEMS Devices Using SOI Cap Wafers With Vertical Feedthroughs." JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , vol.24, pp.556-564, 2015

Torunbalci, M. M. Alper, S. E. And Akın, T. (2015) . "Advanced MEMS Process for Wafer Level Hermetic Encapsulation of MEMS Devices Using SOI Cap Wafers With Vertical Feedthroughs." JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , vol.24, pp.556-564.

@article{article, author={Mustafa Mert Torunbalci Et Al. }, title={Advanced MEMS Process for Wafer Level Hermetic Encapsulation of MEMS Devices Using SOI Cap Wafers With Vertical Feedthroughs}, journal={JOURNAL OF MICROELECTROMECHANICAL SYSTEMS}, year=2015, pages={556-564} }