Tez, S. And Akın, T. 2013. Fabrication of A Sandwich Type Three Axis Capacitive MEMS Accelerometer. 12th IEEE Sensors Conference , (Maryland, United States Of America), 1863-1866.

Tez, S., & Akın, T., (2013). Fabrication of A Sandwich Type Three Axis Capacitive MEMS Accelerometer . 12th IEEE Sensors Conference (pp.1863-1866). Maryland, United States Of America

Tez, Serdar, And TAYFUN AKIN. "Fabrication of A Sandwich Type Three Axis Capacitive MEMS Accelerometer," 12th IEEE Sensors Conference, Maryland, United States Of America, 2013

Tez, Serdar And Akın, TAYFUN. "Fabrication of A Sandwich Type Three Axis Capacitive MEMS Accelerometer." 12th IEEE Sensors Conference , Maryland, United States Of America, pp.1863-1866, 2013

Tez, S. And Akın, T. (2013) . "Fabrication of A Sandwich Type Three Axis Capacitive MEMS Accelerometer." 12th IEEE Sensors Conference , Maryland, United States Of America, pp.1863-1866.

@conferencepaper{conferencepaper, author={Serdar Tez And author={TAYFUN AKIN}, title={Fabrication of A Sandwich Type Three Axis Capacitive MEMS Accelerometer}, congress name={12th IEEE Sensors Conference}, city={Maryland}, country={United States Of America}, year={2013}, pages={1863-1866} }