Chae, J. Et Al. 2005. A monolithic three-axis micro-g micromachined silicon capacitive accelerometer. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , vol.14, no.2 , 235-242.

Chae, J., Kulah, H., & Najafi, K., (2005). A monolithic three-axis micro-g micromachined silicon capacitive accelerometer. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , vol.14, no.2, 235-242.

Chae, J, HALUK KÜLAH, And K Najafi. "A monolithic three-axis micro-g micromachined silicon capacitive accelerometer," JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , vol.14, no.2, 235-242, 2005

Chae, J Et Al. "A monolithic three-axis micro-g micromachined silicon capacitive accelerometer." JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , vol.14, no.2, pp.235-242, 2005

Chae, J. Kulah, H. And Najafi, K. (2005) . "A monolithic three-axis micro-g micromachined silicon capacitive accelerometer." JOURNAL OF MICROELECTROMECHANICAL SYSTEMS , vol.14, no.2, pp.235-242.

@article{article, author={J Chae Et Al. }, title={A monolithic three-axis micro-g micromachined silicon capacitive accelerometer}, journal={JOURNAL OF MICROELECTROMECHANICAL SYSTEMS}, year=2005, pages={235-242} }