Chae, J. Et Al. 2005. A CMOS-compatible high aspect ratio silicon-on-glass in-plane micro-accelerometer. JOURNAL OF MICROMECHANICS AND MICROENGINEERING , vol.15, no.2 , 336-345.

Chae, J., Kulah, H., & Najafi, K., (2005). A CMOS-compatible high aspect ratio silicon-on-glass in-plane micro-accelerometer. JOURNAL OF MICROMECHANICS AND MICROENGINEERING , vol.15, no.2, 336-345.

Chae, J, HALUK KÜLAH, And K Najafi. "A CMOS-compatible high aspect ratio silicon-on-glass in-plane micro-accelerometer," JOURNAL OF MICROMECHANICS AND MICROENGINEERING , vol.15, no.2, 336-345, 2005

Chae, J Et Al. "A CMOS-compatible high aspect ratio silicon-on-glass in-plane micro-accelerometer." JOURNAL OF MICROMECHANICS AND MICROENGINEERING , vol.15, no.2, pp.336-345, 2005

Chae, J. Kulah, H. And Najafi, K. (2005) . "A CMOS-compatible high aspect ratio silicon-on-glass in-plane micro-accelerometer." JOURNAL OF MICROMECHANICS AND MICROENGINEERING , vol.15, no.2, pp.336-345.

@article{article, author={J Chae Et Al. }, title={A CMOS-compatible high aspect ratio silicon-on-glass in-plane micro-accelerometer}, journal={JOURNAL OF MICROMECHANICS AND MICROENGINEERING}, year=2005, pages={336-345} }