S. Alper And T. Akin, "A single-crystal silicon symmetrical and decoupled gyroscope on insulating substrate," 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 03) , Massachusetts, United States Of America, pp.1399-1402, 2003
Alper, S. And Akin, T. 2003. A single-crystal silicon symmetrical and decoupled gyroscope on insulating substrate. 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 03) , (Massachusetts, United States Of America), 1399-1402.
Alper, S., & Akin, T., (2003). A single-crystal silicon symmetrical and decoupled gyroscope on insulating substrate . 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 03) (pp.1399-1402). Massachusetts, United States Of America
Alper, SE, And TAYFUN AKIN. "A single-crystal silicon symmetrical and decoupled gyroscope on insulating substrate," 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 03), Massachusetts, United States Of America, 2003
Alper, SE And Akin, TAYFUN. "A single-crystal silicon symmetrical and decoupled gyroscope on insulating substrate." 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 03) , Massachusetts, United States Of America, pp.1399-1402, 2003
Alper, S. And Akin, T. (2003) . "A single-crystal silicon symmetrical and decoupled gyroscope on insulating substrate." 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 03) , Massachusetts, United States Of America, pp.1399-1402.
@conferencepaper{conferencepaper, author={SE Alper And author={TAYFUN AKIN}, title={A single-crystal silicon symmetrical and decoupled gyroscope on insulating substrate}, congress name={12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 03)}, city={Massachusetts}, country={United States Of America}, year={2003}, pages={1399-1402} }