Torunbalci, M. M. Et Al. 2015. A NOVEL FABRICATION AND WAFER LEVEL HERMETIC SEALING METHOD FOR SOI-MEMS DEVICES USING SOI CAP WAFERS. 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) , (Estoril, Portugal), 409-412.

Torunbalci, M. M., Alper, S. E., & Akın, T., (2015). A NOVEL FABRICATION AND WAFER LEVEL HERMETIC SEALING METHOD FOR SOI-MEMS DEVICES USING SOI CAP WAFERS . 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp.409-412). Estoril, Portugal

Torunbalci, Mustafa, Said Emre Alper, And TAYFUN AKIN. "A NOVEL FABRICATION AND WAFER LEVEL HERMETIC SEALING METHOD FOR SOI-MEMS DEVICES USING SOI CAP WAFERS," 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Estoril, Portugal, 2015

Torunbalci, Mustafa M. Et Al. "A NOVEL FABRICATION AND WAFER LEVEL HERMETIC SEALING METHOD FOR SOI-MEMS DEVICES USING SOI CAP WAFERS." 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) , Estoril, Portugal, pp.409-412, 2015

Torunbalci, M. M. Alper, S. E. And Akın, T. (2015) . "A NOVEL FABRICATION AND WAFER LEVEL HERMETIC SEALING METHOD FOR SOI-MEMS DEVICES USING SOI CAP WAFERS." 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) , Estoril, Portugal, pp.409-412.

@conferencepaper{conferencepaper, author={Mustafa Mert Torunbalci Et Al. }, title={A NOVEL FABRICATION AND WAFER LEVEL HERMETIC SEALING METHOD FOR SOI-MEMS DEVICES USING SOI CAP WAFERS}, congress name={28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)}, city={Estoril}, country={Portugal}, year={2015}, pages={409-412} }