Y. Terzioglu Et Al. , "A Simple Out-of-Plane Capacitive MEMS Accelerometer Utilizing Lateral and Vertical Electrodes for Differential Sensing," 2015 IEEE SENSORS , Busan, South Korea, pp.525-527, 2015
Terzioglu, Y. Et Al. 2015. A Simple Out-of-Plane Capacitive MEMS Accelerometer Utilizing Lateral and Vertical Electrodes for Differential Sensing. 2015 IEEE SENSORS , (Busan, South Korea), 525-527.
Terzioglu, Y., Kose, T., AZGIN, K., & Akin, T., (2015). A Simple Out-of-Plane Capacitive MEMS Accelerometer Utilizing Lateral and Vertical Electrodes for Differential Sensing . 2015 IEEE SENSORS (pp.525-527). Busan, South Korea
Terzioglu, Yunus Et Al. "A Simple Out-of-Plane Capacitive MEMS Accelerometer Utilizing Lateral and Vertical Electrodes for Differential Sensing," 2015 IEEE SENSORS, Busan, South Korea, 2015
Terzioglu, Yunus Et Al. "A Simple Out-of-Plane Capacitive MEMS Accelerometer Utilizing Lateral and Vertical Electrodes for Differential Sensing." 2015 IEEE SENSORS , Busan, South Korea, pp.525-527, 2015
Terzioglu, Y. Et Al. (2015) . "A Simple Out-of-Plane Capacitive MEMS Accelerometer Utilizing Lateral and Vertical Electrodes for Differential Sensing." 2015 IEEE SENSORS , Busan, South Korea, pp.525-527.
@conferencepaper{conferencepaper, author={Yunus Terzioglu Et Al. }, title={A Simple Out-of-Plane Capacitive MEMS Accelerometer Utilizing Lateral and Vertical Electrodes for Differential Sensing}, congress name={2015 IEEE SENSORS}, city={Busan}, country={South Korea}, year={2015}, pages={525-527} }