Tez, S. And Akin, T. 2012. Comparison of Two Alternative Fabrication Processes for a Three-Axis Capacitive MEMS Accelerometer. 26th European Conference on Solid-State Transducers (Eurosensors) , (Krakow, Poland), 342-345.

Tez, S., & Akin, T., (2012). Comparison of Two Alternative Fabrication Processes for a Three-Axis Capacitive MEMS Accelerometer . 26th European Conference on Solid-State Transducers (Eurosensors) (pp.342-345). Krakow, Poland

Tez, S., And TAYFUN AKIN. "Comparison of Two Alternative Fabrication Processes for a Three-Axis Capacitive MEMS Accelerometer," 26th European Conference on Solid-State Transducers (Eurosensors), Krakow, Poland, 2012

Tez, S. And Akin, TAYFUN. "Comparison of Two Alternative Fabrication Processes for a Three-Axis Capacitive MEMS Accelerometer." 26th European Conference on Solid-State Transducers (Eurosensors) , Krakow, Poland, pp.342-345, 2012

Tez, S. And Akin, T. (2012) . "Comparison of Two Alternative Fabrication Processes for a Three-Axis Capacitive MEMS Accelerometer." 26th European Conference on Solid-State Transducers (Eurosensors) , Krakow, Poland, pp.342-345.

@conferencepaper{conferencepaper, author={S. Tez And author={TAYFUN AKIN}, title={Comparison of Two Alternative Fabrication Processes for a Three-Axis Capacitive MEMS Accelerometer}, congress name={26th European Conference on Solid-State Transducers (Eurosensors)}, city={Krakow}, country={Poland}, year={2012}, pages={342-345} }