Aydemir, A. And AKIN, T. 2015. Process Development for the Fabrication of a Three Axes Capacitive MEMS Accelerometer. Conference on EUROSENSORS , (Freiburg, Germany), 727-730.

Aydemir, A., & AKIN, T., (2015). Process Development for the Fabrication of a Three Axes Capacitive MEMS Accelerometer . Conference on EUROSENSORS (pp.727-730). Freiburg, Germany

Aydemir, Akin, And TAYFUN AKIN. "Process Development for the Fabrication of a Three Axes Capacitive MEMS Accelerometer," Conference on EUROSENSORS, Freiburg, Germany, 2015

Aydemir, Akin And AKIN, TAYFUN. "Process Development for the Fabrication of a Three Axes Capacitive MEMS Accelerometer." Conference on EUROSENSORS , Freiburg, Germany, pp.727-730, 2015

Aydemir, A. And AKIN, T. (2015) . "Process Development for the Fabrication of a Three Axes Capacitive MEMS Accelerometer." Conference on EUROSENSORS , Freiburg, Germany, pp.727-730.

@conferencepaper{conferencepaper, author={Akin Aydemir And author={TAYFUN AKIN}, title={Process Development for the Fabrication of a Three Axes Capacitive MEMS Accelerometer}, congress name={Conference on EUROSENSORS}, city={Freiburg}, country={Germany}, year={2015}, pages={727-730} }