KINCAL, S. And BAŞIM DOĞAN, G. B. 2012. A Modeling Study on the Layout Impact of with-in-die Thickness Range for STI CMP. 12th Chemical Mechanical Polishing Symposium (CMP) during the 222nd Meeting of the Electrochemical-Society (ECS) , (Hawaii, United States Of America), 83-89.

KINCAL, S., & BAŞIM DOĞAN, G. B., (2012). A Modeling Study on the Layout Impact of with-in-die Thickness Range for STI CMP . 12th Chemical Mechanical Polishing Symposium (CMP) during the 222nd Meeting of the Electrochemical-Society (ECS) (pp.83-89). Hawaii, United States Of America

KINCAL, SERKAN, And GÜL BAHAR BAŞIM DOĞAN. "A Modeling Study on the Layout Impact of with-in-die Thickness Range for STI CMP," 12th Chemical Mechanical Polishing Symposium (CMP) during the 222nd Meeting of the Electrochemical-Society (ECS), Hawaii, United States Of America, 2012

KINCAL, SERKAN And BAŞIM DOĞAN, GÜL B. . "A Modeling Study on the Layout Impact of with-in-die Thickness Range for STI CMP." 12th Chemical Mechanical Polishing Symposium (CMP) during the 222nd Meeting of the Electrochemical-Society (ECS) , Hawaii, United States Of America, pp.83-89, 2012

KINCAL, S. And BAŞIM DOĞAN, G. B. (2012) . "A Modeling Study on the Layout Impact of with-in-die Thickness Range for STI CMP." 12th Chemical Mechanical Polishing Symposium (CMP) during the 222nd Meeting of the Electrochemical-Society (ECS) , Hawaii, United States Of America, pp.83-89.

@conferencepaper{conferencepaper, author={SERKAN KINCAL And author={GÜL BAHAR BAŞIM DOĞAN}, title={A Modeling Study on the Layout Impact of with-in-die Thickness Range for STI CMP}, congress name={12th Chemical Mechanical Polishing Symposium (CMP) during the 222nd Meeting of the Electrochemical-Society (ECS)}, city={Hawaii}, country={United States Of America}, year={2012}, pages={83-89} }