Aydemir, A. Et Al. 2016. A new design and a fabrication approach to realize a high performance three axes capacitive MEMS accelerometer. SENSORS AND ACTUATORS A-PHYSICAL , vol.244 , 324-333.

Aydemir, A., Terzioglu, Y., & AKIN, T., (2016). A new design and a fabrication approach to realize a high performance three axes capacitive MEMS accelerometer. SENSORS AND ACTUATORS A-PHYSICAL , vol.244, 324-333.

Aydemir, Akin, Yunus Terzioglu, And TAYFUN AKIN. "A new design and a fabrication approach to realize a high performance three axes capacitive MEMS accelerometer," SENSORS AND ACTUATORS A-PHYSICAL , vol.244, 324-333, 2016

Aydemir, Akin Et Al. "A new design and a fabrication approach to realize a high performance three axes capacitive MEMS accelerometer." SENSORS AND ACTUATORS A-PHYSICAL , vol.244, pp.324-333, 2016

Aydemir, A. Terzioglu, Y. And AKIN, T. (2016) . "A new design and a fabrication approach to realize a high performance three axes capacitive MEMS accelerometer." SENSORS AND ACTUATORS A-PHYSICAL , vol.244, pp.324-333.

@article{article, author={Akin Aydemir Et Al. }, title={A new design and a fabrication approach to realize a high performance three axes capacitive MEMS accelerometer}, journal={SENSORS AND ACTUATORS A-PHYSICAL}, year=2016, pages={324-333} }