Anutgan, M. Et Al. 2009. Influence of the nitrogen flow rate on the order and structure of PECVD boron nitride thin films. JOURNAL OF NON-CRYSTALLINE SOLIDS , vol.355 , 1622-1629.

Anutgan, M., Anutgan, T. A., Ozkol, E., Atilgan, I., & Katircioglu, B., (2009). Influence of the nitrogen flow rate on the order and structure of PECVD boron nitride thin films. JOURNAL OF NON-CRYSTALLINE SOLIDS , vol.355, 1622-1629.

Anutgan, M. Et Al. "Influence of the nitrogen flow rate on the order and structure of PECVD boron nitride thin films," JOURNAL OF NON-CRYSTALLINE SOLIDS , vol.355, 1622-1629, 2009

Anutgan, M. Et Al. "Influence of the nitrogen flow rate on the order and structure of PECVD boron nitride thin films." JOURNAL OF NON-CRYSTALLINE SOLIDS , vol.355, pp.1622-1629, 2009

Anutgan, M. Et Al. (2009) . "Influence of the nitrogen flow rate on the order and structure of PECVD boron nitride thin films." JOURNAL OF NON-CRYSTALLINE SOLIDS , vol.355, pp.1622-1629.

@article{article, author={M. Anutgan Et Al. }, title={Influence of the nitrogen flow rate on the order and structure of PECVD boron nitride thin films}, journal={JOURNAL OF NON-CRYSTALLINE SOLIDS}, year=2009, pages={1622-1629} }